To increase product quality, injection molding tools are equipped with innovative tempering technologies. The customers strive for the technology with the lowest energy consumption. Ceramic materials like yttria-stabilized zirconia (YSZ) are able to thermally insulate tool surfaces providing a more precise temperature regulation with intent to shorten cycle times as well as to decrease energy demands during the molding process. High quality ceramic thin films could be applied by metalorganic chemical vapor deposition (MOCVD). Laser machining technologies have been developed for machining the ceramic materials. In this work we demonstrate the fabrication of zirconia based thin films on steel tools via MOCVD using solid metalorganic precursors. Shorter coating times and a solvent free process are some of the advantages of our new developed coating process. The ultrashort pulse laser processing (USPLP) was used to structure the developed CVD coating. Using this technology the ceramic material undergoes no thermal stress cracks, because USPLP is characterized by the preference of cold material removal. The laser processing procedure was developed by working out machining parameters for the different materials. The difference between steel and ceramic in the removal behavior was determined immediately so that a machining strategy for the ceramic CVD coating could be designed successfully. The implementation of defined roughnesses and a carbon fiber like structure in the coating were realized. Coated and laser-structured injection molding tools were tested regarding their desired properties under production conditions.